This book defines over 1000 words, phrases, abbreviations, and acronyms of ion implantation and associated semiconductor processes commonly overheard in the implanter bay. It is the perfect resource for a novice to the field of ion implantation as well as an excellent reference for the experienced implant engineer or physicist. In addition, manufacturing personnel will find it to be a valuable guide to aid them in their understanding of ion implantation as well as ion implantation equipment. ISBN 1-889381-01-2. 172 pages. 5.5"x8.5" Soft Cover.